TUBESTAR
R&D & Pilot Production
Batch type Tube Furnace
Diffusion, LPCVD and Oxidation
1 to 4 Independent Tubes
25 to 100 wafers per tube
Ideal for Process Engineering
Tiny Footprint
Manual or Automatic Loading
DF-SERIES
Mass Production Furnace
3 to 4 Independent Tubes
75 to 400 wafers per tube
Compatible up to 300mm
Best in-class Uniformity
Automatic Loading