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Product Details
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Product Details
SPIN RINSE DRYER
Description
SRD Dual-Chamber (Spin Rinse Dryer)
Applications :
Spin Rinse Dryer wafer or remove the remains
Features
Customized design of the rotor.
Supply to the biggest wafer 200mm(8inch)
The most Spin RPM 2400 RPM
DI water clean
Pipe purge
Spin dryer with hot N₂ (70℃)
N₂ Low pressure switch
Water resistance meter
Anti-static devices
EMO (emergency stop devices)
Supported 15 recipes and 10 step/recipe
Supported warning & alarm window let user can fix problem soon