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Product Details
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Product Details
SST (Spray Solvent Tool)
Description
SST (Spray Solvent Tool)
The SST (Spray Solvent Tool) provides batch-process for Metal Lift-Off, Photoresist Strip, Polymer Removal and other demanding solvent based processes.
Applications
Metal Lift-Off、Polymer Removal、Pre Diffusion Clean、DHF, SC1, SC2、 Wafer Reclaim、positive or negative photo-resist strip、Mask clean、Post CMP Clean
Features
Single and dual cassette
High throughput
Fire protection
Dry in, dry out
Chemical reclaim
Dry in, dry out
Chemical reclaim
Minimal size and quantity exhaust
safety
Small footprint
Easy to maintain