3D Optical Microscope
- Measurement Principle: Confocal Optical System
- Measurement Type: Non-contact 3D surface metrology
- Measurement Accuracy: Up to 12 nm repeatability with 0.1 nm resolution
- Objectives: 10×, 20×, 50×, 100×
- Motorized XY Stage with 5-position objective turret
- 5 MP CCD Camera with LED confocal illumination
- Software: Integrated 3D analysis, roughness, profile measurement, automatic stitching, and report generation
- Applications: Solar cells, semiconductors, MEMS, precision engineering, thin-film characterization, and surface roughness analysis.
