Spectroscopic Ellipsometer
- Spectral Range: 245 – 1000 nm (sampling interval)
- Incident Angle: Fixed at (default)
- Technology: Single-Rotating-Compensator (P-S-C-A mode) | range
- Performance:
- Measurement Time: 5–10 seconds
- Film Thickness Repeatability:
- Refractive Index Accuracy:
- Spot & Stage: manual spot diameter | Manual height / tilt stage with vacuum adsorption
- Alignment: Electronic video-based image alignment.
