Inkjet Printing System

Features

• Printing speed up to 2, 500 wafer/ hour
• Recirculating ink supply system
• Automatic Purging and cleaning system
• Precise ink deposition on designated areas, with full thin-film coverage on silicon substrates
• Droplet control technology enabling nanometer-level film thickness regulation
• Compatible with multiple substrate sizes
• Fully automated printhead maintenance station
• Process can be directly scaled up for mass production
• High-speed, high -resolution CCD alignment system

Technical Parameters

• Printing Speed Control Range : 10 – 800 mm/s
• Film Thickness Non-uniformity : ≤5%
• Printing Mode : Unidirectional ONEPASS Printing
• Printing Resolution : 600 × 600 dpi or 1200 × 600 dpi
• Print System Lifting Height : 50 mm
• Printhead Height Repeatability : ± 5 µm
• Platform Flatness : ± 5 µm